Dry Vacuum Pump

This dry-running vacuum pump sets a new standard for high-performance vacuum in large-area coating applications. Its oil-free, electronically synchronized design enables up to 50% faster load lock evacuation and shorter cycle times, while reducing energy use, backing pump size and system footprint.

Introduction

Accelerate throughput with dramatically faster pump-down and shorter batch cycle times, helping increase output from existing equipment
Maximize vacuum performance with very high flow capacity and compression ratios, enabling reliable operation from atmospheric pressure to fine vacuum
Reduce energy and system demands with efficient operation, lower backing pump capacity requirements and a more compact installation footprint
Protect product purity with totally oil-free operating and drive principle with no mechanical shaft seals that helps eliminate the risk of process contamination
Lower lifecycle costs with minimal maintenance, low noise and vibration, and service-friendly design that helps reduce downtime
Deep vacuum level down to 10-4 Torr in combination with a dry screw backing pump

Size range: Sizes from 3,500 up to 8,000 m³/h (2,100 to 4,800 cfm) suction capacity